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This book offers an in-depth presentation of the mechanics of particles and systems.Nottingham Trent University is an elite, research-intensive university located in the region of Nottingham and the surrounding area. Our mission is to support our students in a way that maximises their success and enables them to reach their potential, both academically and in terms of their wider development.
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Please see below for full job description, but if you have any questions, please apply via the link below.The present invention relates to a dry etching method which is performed in fabricating a semiconductor device. More specifically, the invention relates to a dry etching method capable of preventing the formation of particles of the etched products at the end of a dry etching process.
In recent years, due to miniaturization of design rules for semiconductor devices, there has been an increase in the number of mask patterns formed on a semiconductor substrate. As a result, masks used in the exposure process and the dry etching process are complicated and the number of exposed substrate patterns is increasing.
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